The photolithography process of firing a circuit on a semiconductor wafer (substrate) is one of the most important processes in the semiconductor manufacturing process.The lithography equipment is based in the NetherlandsASMLMaster the overwhelming share, and without the pre- and post-processing technology related to the photolithography process, semiconductor manufacturing cannot be completed. Nikkei (Chinese version: Nikkei Chinese website) according to the Japan Patent Office (Patent Office)4The application trend survey “Semiconductor lithography pre- and post-processing technology” released this month summarizes the trends in lithography peripheral technology.
The semiconductor manufacturing process is divided into a front process of manufacturing a large number of circuits on a circular substrate and a post process of cutting the circuits formed on the substrate into sheets and then assembling them. The core of the pre-process is the photolithography process. According to the circuit diagram fired by the photolithography equipment, the substrate is cut and the wiring is performed to complete the semiconductor wafer manufacturing. The JPO’s investigation focused on the processes of coating, developing, and peeling photoresist (photosensitive resin) necessary for the front and back processes of photolithography equipment.
The most applications in the field of pre- and post-processing of lithography
In the field of pre- and post-processing of lithography, Japanese semiconductor manufacturing equipment companies have played a stable advantage.From2006～2018In terms of patents filed each year, applicants of Japanese nationality account for4The number is the largest.From2006～2018According to the cumulative annual data, in4ten thousand2646In applications1ten thousand8531Item (proportion43.5%) applicants are of Japanese nationality, which is significantly more than7000A number of South Korea and the United States.
 |
On the other hand, according to the country and region where the applicant applies,2009～2011The most applications were filed in Japan this year, and then gradually decreased,2012The number of applications made in the United States surpassed Japan in 1999, and the United States has maintained its first place ever since.From2018According to the applications made in the year, the United States is followed by China, South Korea and Taiwan, and the number of applications in Japan is lower than in these countries and regions. Some analysts believe that this reflects the decline in Japan’s share of world semiconductor production and other issues.
 |
From2006～2018According to the cumulative annual data, the US application is1ten thousand678Items, as a whole25.0%, but judging from the composition of applicants in the United States, applications from Japan are32.1%, the highest proportion.Among Korean applications, Korean nationals account for50.1%, while the applications from China and Taiwan are the most from Japan, which shows that Japanese companies still have advantages in major markets.
Tokyo Electronics is widely involved in many fields
From the perspective of individual applicants, Tokyo Electronics has applied for stable applications every year400About items,2006～2018Accumulatively reached5196Items, as a whole12.1%.Tokyo Electronics has mastered more than80% Of the global share.The cumulative number of applications ranked2JapanSCREENThe holdings are also stronger than coating and developing equipment. These two companies account for a global share of90%above.
Copyright statement: All rights reserved by Nihon Keizai Shimbun. Unauthorized reproduction or partial reproduction is prohibited. Offenders must be investigated.
.
